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Large Area Plasma Processing System (LAPPS)

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Lab: Naval Research Laboratory
Category: Physics, Physical Science

4556 Overlook Avenue S.W.
Washington, DC, 20375

Phone: 202-767-3083 ext.
Fax: 202-404-7920

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FUNCTION: Study beam-generated plasmas for materials processing applications. Independently generated kilovolt electron beams pass through the chamber confined by an axial magnetic field and ionize the background gas. The low temperature, high-density, uniform plasma sheet can be positioned close to a surface to be processed. The NRL-developed Large Area Plasma Processing System (LAPPS) can generate square meter plasmas with higher efficiency and better control than other techniques presently used in materials processing.

DESCRIPTION: The ultrahigh vacuum chamber is filled with a process gas. The large field coils are used to generate 100 to 300 Gauss magnetic fields along one axis, which confine a 1 to 3 kV, few milliamperes per square centimeter electron beam. A surface located inside the chamber can be moved close to the plasma sheet generated by the beam. Materials such as semiconductors to be etched or dielectrics to be coated can be mounted on the surface for processing by the plasma. The ports are used for diagnostics to measure beam, plasma, or surface conditions.

Documents:

2001 NRL Major Facilities
2001 NRL Major Facilities